Imprint apparatus and article manufacturing method

ABSTRACT

An imprint apparatus of the present invention that molds and cures an imprint material on a substrate using a mold to form a pattern on the substrate. The imprint apparatus includes a supply unit configured to supply a gas into a gap between the imprint material on the substrate and the mold. The supply unit is configured to supply a mixed gas in which a permeable gas, which permeates at least one of the mold, the imprint material and the substrate, and a condensable gas, which is liquefied under a pressure generated by the molding, is mixed with each other.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an imprint apparatus, and an articlemanufacturing method.

2. Description of the Related Art

As the demand for microfabrication of semiconductor devices increases,not only a conventional photolithography technology but also amicrofabrication technology in which an uncured resin on a substrate ismolded by a mold to thereby form a resin pattern on the substrate havebeen receiving attention. This technology is also referred to as an“imprint technology”, by which a fine structure with dimensions of a fewnanometers can be formed on a substrate. One example of imprinttechnologies includes a photo-curing method. An imprint apparatusemploying the photo-curing method first applies an ultraviolet curableresin (imprint resin, photocurable resin) to a shot area (imprint area)on a substrate (wafer). Next, the resin (uncured resin) is molded by amold. After the ultraviolet curable resin is irradiated with ultravioletlight for curing, the cured resin is released from the mold, whereby aresin pattern is formed on the substrate.

In the imprint apparatus, an atmosphere in the apparatus is typicallyambient air. Thus, ambient air may remain in the space between a moldand resin when the mold is pressed against the resin. Because of theentrapped air bubbles (residual gas) in the resin, defects may occur onthe pattern to be transferred. Consequently, an accurate pattern may notbe formed. In contrast, a method for waiting until residual gas isdissolved into, diffused from, or passed through a resin or a mold tothereby be extinguished may exist, however, a considerable amount oftime is required for an imprinting step. Accordingly, U.S. Pat. No.7,090,716 discloses an imprint apparatus that dissolves or diffuses theremaining a permeable gas into/from a resin or a mold to therebydecrease residual gas quickly by using a permeable gas as an imprintatmosphere. On the other hand, Japanese Patent No. 3700001 discloses animprint apparatus in which a condensable gas to be condensed by pressurerise upon pressing a mold against a resin is used as an imprintatmosphere. Since the condensable gas is liquefied during remaining, andthus, its volume is reduced by up to a few hundredths of one percent incompared with its volume in the gaseous state, the effects of theresidual gas on pattern formation may be suppressed.

However, in the imprint apparatuses disclosed in U.S. Pat. No. 7,090,716and Japanese Patent No. 3700001, imprint atmosphere is totally purged bya permeable gas or a condensable gas, which is disadvantageous in termsof cost. Also, the imprint apparatus typically measures the position ofa wafer stage or the like, which moves as appropriate, accurately usingan interference displacement measuring unit. Since the measuring beam(light) is used, the measuring unit is very sensitive to changes in thecomposition of the medium (atmosphere) passing therethrough or changesin pressure and temperature. Thus, when the periphery of a resin on asubstrate is purged by, for example, a gas having refractive indexdifferent from that of ambient air, the interference displacement maynot accurately be measured if the gas enters the optical path of themeasuring unit. Here, a permeable gas has smaller specific gravity thanthat of ambient air and has smaller refractive index than that ofambient air. Thus, if the permeable gas enters the optical path of themeasuring beam, the refractive index of medium becomes small, and thus,interference displacement measurement may become unstable. On the otherhand, a condensable gas has greater specific gravity than that ofambient air and has greater refractive index than that of ambient air.Thus, if the condensable gas enters the optical path of the measuringbeam, the refractive index of medium becomes great, and thus,interference displacement measurement may also become unstable. Ifinterference displacement measurement becomes unstable, the positioningof a wafer stage or the like becomes unstable. Consequently, theposition of a pattern to be transferred deviates from the targetposition, and thus, accurate pattern formation may not be provided.

SUMMARY OF THE INVENTION

The present invention provides an imprint apparatus that is advantageousin compatibility between accurate pattern formation and throughput.

According to an aspect of the present invention, an imprint apparatusthat molds and cures an imprint material on a substrate using a mold toform a pattern on the substrate is provided that includes a supply unitconfigured to supply a gas into a gap between the imprint material onthe substrate and the mold, wherein the supply unit is configured tosupply a mixed gas in which a permeable gas, which permeates at leastone of the mold, the imprint material, and the substrate, and acondensable gas, which is liquefied under a pressure generated by themolding, is mixed with each other.

According to the present invention, an imprint apparatus that isadvantageous in compatibility between accurate pattern formation andthroughput may be provided.

Further features of the present invention will become apparent from thefollowing description of exemplary embodiments with reference to theattached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram illustrating the configuration of an imprintapparatus according to an embodiment of the present invention.

FIG. 2 is a graph illustrating the refractive indices of gases relativeto the wavelength of a measuring beam.

DESCRIPTION OF THE EMBODIMENTS

Hereinafter, preferred embodiments of the present invention will bedescribed with reference to the drawings.

Firstly, a description will be given of the configuration of an imprintapparatus according to one embodiment of the present invention. FIG. 1is a diagram illustrating the configuration of an imprint apparatus ofthe present embodiment. The imprint apparatus is an apparatus that moldsan imprint material (typically, uncured resin) on a wafer (on asubstrate), i.e., an object to be treated, using a mold to thereby forma pattern (typically, resin pattern) on the substrate, which is used inthe manufacture of devices such as semiconductor devices and the like.Here, the imprint apparatus is an apparatus employing a photo-curingmethod. In the following drawings, a description will be given where theZ axis is aligned parallel to the optical axis of an illumination unitthat illuminates ultraviolet light onto a resin on a substrate, andmutually orthogonal axes X and Y are aligned in the direction in a planeperpendicular to the Z axis. An imprint apparatus 1 includes anillumination unit 2, a mold holding unit 3, a wafer stage 4, a dispenser5, a gas supply unit 6 and a controller 7.

The illumination unit 2 irradiates a mold 8 with ultraviolet lightduring imprint processing. The illumination unit 2 is constituted by alight source (not shown) and an optical element that adjusts ultravioletlight emitted from the light source to a light suitable for imprinting.The mold 8 is a mold in which a predetermined pattern (e.g., a concaveand convex pattern such as a circuit pattern or the like) isthree-dimensionally formed on a side facing a wafer 10. The material ofthe mold 8 is a material such as quartz or the like through whichultraviolet light can pass.

The mold holding unit (holding unit) 3 draws and holds the mold 8 usinga vacuum attraction force or an electrostatic force. The mold holdingunit 3 includes a mold chuck 9 and a mold drive mechanism (not shown)that drives the mold holding unit 3 in the Z axial direction so as topress the mold 8 against an ultraviolet curable resin applied to thewafer 10. The mold-printing operation and the mold-releasing operationperformed by the imprint apparatus 1 may be realized by moving the mold8 in the Z direction as described above, may be realized by moving thewafer stage 4 (the wafer 10) in the Z direction, or may also be realizedby moving both the mold 8 and the wafer stage 4 (the wafer 10) in the Zdirection.

The wafer stage 4 is a holding unit including a wafer chuck 11 thatholds the wafer 10 by vacuum attraction or the like and is moveable inthe XY plane. Here, the wafer 10 is an object to be treated consistingof, for example, a single crystal silicon, and an ultraviolet curableresin (hereinafter referred to simply as “resin”), which is molded bythe mold 8, is applied to the treatment surface thereof. Also, the waferstage 4 includes a plurality of reference mirrors (reflecting parts) 13on the periphery thereof such that the position of the wafer stage 4 canbe controlled with the six degrees of freedom (X, Y, Z, ωx, ωy, and ωz).The imprint apparatus 1 includes a plurality of laser interferometers(measuring units) 14 that measure the position of the wafer stage 4 byirradiating each of these reference mirrors 13 with beam. The laserinterferometer 14 measures the position of the wafer stage 4 on areal-time basis. The controller 7 to be described below executespositioning control for the wafer 10 (the wafer stage 4) based on themeasured value.

The dispenser 5 applies a resin 12 (uncured resin) to the wafer 10.Here, the resin 12 is a photocurable resin (imprint material) having theproperty of being cured by receiving irradiation of ultraviolet light,and is appropriately selected depending on the manufacturing process ofsemiconductor devices or the like.

The gas supply unit (supply unit) 6 supplies a mixed gas towards themold-pressing position during a mold-pressing operation for pressing themold 8 against the resin 12 on the wafer 10 to each other. The gassupply unit 6 includes a permeable gas supply unit 20 that firstsupplies a permeable gas having dissolution and diffusion properties toat least one of the mold 8, the resin 12, and the wafer 10. Also, thegas supply unit 6 includes a condensable gas supply unit 21 thatsupplies a condensable gas having the property of being condensed andliquefied by applying pressure (pressure rise). Here, as the permeablegas, gas such as helium, hydrogen, or the like may be employed. Itshould be noted that, if combustible hydrogen is used as the permeablegas, an explosion-proof system needs to be separately provided in theimprint apparatus 1 so as to be ensure protection against fire. On theother hand, as the condensable gas, HFCs (hydrofluorocarbon) typified byHFC-245fa (1,1,1,3,3-pentafluoropropane, CHF₂CH₂CF₃) may be employed.Note that gas to be employed as a condensable gas is not limitedthereto, but may also be HFE (hydrofluoroether) typified by HFE-245mc(CF₃CF₂OCH₃) or the like. Further, the gas supply unit 6 includes a gasmixing unit 22 that mixes a permeable gas and a condensable gas suppliedfrom the permeable gas supply unit 20 and the condensable gas supplyunit 21, respectively, and a gas supply controller 25 that controls thesupply amount of gases to be supplied to the gas mixing unit 22 via afirst valve 23 and a second valve 24. The gas supply controller 25 is anadjustment device that supplies a mixed gas, which has been generated bymixing gases at a desired component ratio in the gas mixing unit 22,from a gas supply nozzle 27 to the mold-pressing position sandwichedbetween the mold 8 and the wafer 10 while adjusting the supply amount bycontrolling a third valve 26. The gas supply controller 25 may besingularly provided in the imprint apparatus 1 so as to be connected tothe controller 7 (to be described below) via a line or may be integralwith the controller 7.

The controller 7 may control the operation, adjustment, and the like ofthe components of the imprint apparatus 1. The controller 7 isconstituted by a computer or the like and is connected to the componentsof the imprint apparatus 1 through a line so as to execute control ofthe components by a program or the like. In the present embodiment, thecontroller 7 controls the processing operation of at least the laserinterferometer 14 and the gas supply controller 25 as well as theoperation of the mold holding unit 3, the wafer stage 4, and the like.Note that the controller 7 may be integrated with the rest of theimprint apparatus 1, or may be installed at a location separate from thelocation where the rest of the imprint apparatus 1 is installed.

Next, imprint processing performed by the imprint apparatus 1 will nowbe described. First, the controller 7 places and fixes the wafer 10 onthe wafer stage 4 using a substrate conveyance device (not shown), andthen moves the wafer stage 4 to the application position of thedispenser 5. Then, as an application step, the dispenser 5 applies aresin (uncured resin) 12 to a predetermined shot (imprint area) on thewafer 10. Next, the controller 6 moves the wafer stage 4 such that theshot on the wafer 10 is placed in a position directly below the mold 8.Next, after the mold 8 is aligned with the shot on the wafer 10 and themagnification correction for the mold 8 is carried out using amagnification correction mechanism (not shown), the controller 7 drivesthe mold drive mechanism so as to press the mold 8 against the resin 12on the wafer 10 (mold-pressing step). During the mold-pressing step, theresin 12 is filled in the concave portion formed in the mold 8. Underthis condition, the illumination unit 2 emits ultraviolet light from theback surface (top surface) of the mold 8, and the resin 12 is cured bythe ultraviolet light that has been transmitted through the mold 8 as acuring step. After the resin 12 is cured, the controller 7 again drivesthe mold drive mechanism to thereby release the mold 8 from the wafer 10(mold-releasing step). By the aforementioned steps, the threedimensionally shaped layer of the resin 12 following the concave andconvex pattern is formed on the shot surface on the wafer 10.

In particular, in the mold-pressing step of the present embodiment, thecontroller 7 causes the gas supply unit 6 to supply a mixed gas of apermeable gas and a condensable gas to the mold-pressing position. FIG.2 is a graph illustrating the relationship between the refractive indexof each atmosphere (ambient air, a permeable gas, a condensable gas, anda mixed gas of the permeable gas and the condensable gas) and themeasuring beam wavelength of the laser interferometer 14. Here, apermeable gas is helium gas and a condensable gas is HFC-245fa gas. Asdescribed above, a permeable gas typically has a small moleculardimension and has smaller refractive index than that of ambient air,whereas the refractive index of a condensable gas is greater than thatof ambient air. Thus, given that the refractive index of ambient air of1 atm is n_(air), the refractive index of a permeable gas is n₁, and therefractive index of a condensable gas is n₂, the relationship shown inthe following Formula (1) is satisfied:

n ₁<n_(air)<n₂  (1)

Furthermore, when the refractive index of a mixed gas of a permeable gasand a condensable gas of 1 atm is n₃, the difference in refractive indexbetween a permeable gas and ambient air is Δn₁, the difference inrefractive index between a condensable gas and ambient air is Δn₂, andthe difference in refractive index between a mixed gas and ambient airis Δn₃. Here, if a mixed gas is used, the difference in refractive indexbetween a mixed gas and its surrounding ambient air may become smallerin comparison with the case where only a permeable gas is used as a gasto be supplied to the mold-pressing position, whereby the effects oninterference displacement measurement may be suppressed. Such case maybe achieved only when the relationship shown in the following Formula(2) is satisfied:

|Δn ₁ |>|Δn ₂|  (2)

On the other hand, if a mixed gas is used, the difference in refractiveindex between a mixed gas and its surrounding ambient air may becomesmaller in comparison with the case where only a condensable gas is usedas a gas to be supplied to the mold-pressing position, whereby theeffects on interference displacement measurement may be suppressed. Suchcase may be achieved only when the relationship shown in the followingFormula (3) is satisfied:

|Δn ₂ |>|Δn ₂|  (3)

In Formulae (2) and (3), the difference in refractive index therebetweenis the absolute value. Specifically, if a permeable gas and acondensable gas, which satisfy the condition shown in Formula (1), areused, the conditions shown in Formula (2) and Formula (3) arenecessarily satisfied. In this case, the effects on interferencedisplacement measurement may be suppressed in comparison with the caseof a single use of either a permeable gas or a condensable gas.

Thus, when a mixed gas of a permeable gas and a condensable gas issupplied to the mold-pressing position, two gas recovery nozzles 30 and31 may be provided in the imprint apparatus 1. As shown in FIG. 1, theoptical path of the laser interferometer 14 is at a position lower thanthat of the top surface of the wafer chuck 11. Here, since HFC-245fa ina mixed gas has a greater specific gravity than that of helium andambient air, HFC-245fa may be separated from a mixed gas to therebyreadily enter an interference displacement measurement region (opticalpath). Hence, the component ratio of helium may be set to be slightlyhigher than a ratio at which the refractive index of helium becomes thesame as that of ambient air. In this case, the refractive index of amixed gas to be supplied is smaller than that of ambient air. Also, theimprint apparatus 1 includes a first gas recovery nozzle 30 that isprovided at a position higher than the mold-pressing position and asecond gas recovery nozzle 31 that is provided at a position lower thanthe mold-pressing position in the direction of gravity. The gas recoverynozzles 30 and 31 are connected to first and second gas recovery units32 and 33, respectively. With this arrangement, the gas recovered by thefirst gas recovery unit 32 has a higher abundance ratio of helium,whereas the gas recovered by the second gas recovery unit 33 has ahigher abundance ratio of HFC-245fa. Therefore, helium and HFC-245fa,which have been separated in the imprint apparatus 1, may be efficientlyrecovered, which is advantageous in terms of recycling gas. When theoptical path of the laser interferometer 14 is at a position higher thanthat of the top surface of the wafer chuck 11, the component ratio ofHFC-245fa may be set to be slightly higher than a ratio at which therefractive index of HFC-245fa becomes the same as that of ambient air.In this case, the refractive index of a mixed gas to be supplied isgreater than that of ambient air.

Furthermore, the controller 7 may adjust the component ratio of a mixedgas based on the output of the laser interferometer 14 with the waferstage 4 arranged at the known position. For example, when the measuredvalue during supply of a mixed gas exceeds an allowable range based onthe output, the controller 7 instructs the gas supply controller 25 tochange the component ratio of a mixed gas. On the other hand, when adetector for detecting the gaseous component of the atmosphere containedin the optical path of the measuring beam is provided in the imprintapparatus 1 and the component value of a condensable gas contained inthe detected gaseous component exceeds an allowable range, thecontroller 7 may cause the gas supply controller 25 to change thecomponent ratio of a mixed gas. In this case, an analyzer unit foranalysing a gaseous component may also be provided in association withthe detector. Here, the aforementioned allowable range may be determinedby taking the apparatus configuration and dimension, the pastperformance of imprint processing, and the like into consideration. Inthis manner, even when a condensable gas or the like separated from amixed gas during supply of the mixed gas enters the optical path of themeasuring beam and the output of the laser interferometer 14 is affectedthereby, the imprint apparatus can instantly deal with such situation.

As described above, according to the present embodiment, accuratemeasurement with the laser interferometer 14 may be performed while theamount of gas remaining in the space between the mold 8 and the resin 12is reduced in a short time. Therefore, an imprint apparatus that isadvantageous in accurate pattern formation and throughput compatibilitymay be provided.

(Article Manufacturing Method)

A method for manufacturing a device (semiconductor integrated circuitelement, liquid display element, or the like) as an article may includea step of forming a pattern on a substrate (wafer, glass plate,film-like substrate, or the like) using an imprint apparatus configuringthe lithography system described above. Further, the manufacturingmethod may include a step of etching the substrate on which a patternhas been formed. When other article such as a patterned medium (storagemedium), an optical element, or the like is manufactured, themanufacturing method may include other step of processing the substrateon which a pattern has been formed instead of the etching step. Thearticle manufacturing method of the present embodiment has an advantage,as compared with a conventional article manufacturing method, in atleast one of performance, quality, productivity and production cost ofan article.

While the present invention has been described with reference toexemplary embodiments, it is to be understood that the invention is notlimited to the disclosed exemplary embodiments. The scope of thefollowing claims is to be accorded the broadest interpretation so as toencompass all such modifications and equivalent structures andfunctions.

This application claims the benefit of Japanese Patent Application No.2011-023516 filed Feb. 7, 2011 which is hereby incorporated by referenceherein in its entirety.

What is claimed is:
 1. An imprint apparatus that performs molding of animprint material on a substrate using a mold to form a pattern on thesubstrate, the imprint apparatus comprising: a supply unit including amixing unit configured to mix permeable gas that permeates the mold, theimprint material or the substrate or any two thereof or all thereof, andcondensable gas that is different from gas of a constituent of theimprint material and liquefied under a pressure generated by themolding, and configured to perform supplying of the mixed gas betweenthe imprint material on the substrate and the mold from the mixing unit,wherein the imprint apparatus is configured to perform the molding withthe supplying having been performed.
 2. The apparatus according to claim1, wherein the permeable gas includes helium or hydrogen or boththereof.
 3. The apparatus according to claim 1, wherein the condensablegas includes hydrofluorocarbon or hydrofluoroether or both thereof. 4.The apparatus according to claim 1, wherein the supply unit includes asupply nozzle and is configured to supply the mixed gas from the mixingunit via the supply nozzle.
 5. The apparatus according to claim 1,further comprising an adjustment device configured to adjust a ratio ofconstituents of the mixed gas.
 6. The apparatus according to claim 5,further comprising: a detector configured to detect a constituent of themixed gas, wherein the adjustment device is configured to adjust theratio based on an output of the detector.
 7. The apparatus according toclaim 1, further comprising a recovery nozzle configured to recover themixed gas.
 8. A method of manufacturing an article, the methodcomprising the steps of: forming a pattern on a substrate using animprint apparatus; and processing the substrate, on which the patternhas been formed, to manufacture the article, wherein the imprintapparatus performs molding of an imprint material on the substrate usinga mold to form the pattern on the substrate, the imprint apparatusincluding: a supply unit including a mixing unit configured to mixpermeable gas that permeates the mold, the imprint material or thesubstrate or any two thereof or all thereof, and condensable gas that isdifferent from gas of a constituent of the imprint material andliquefied under a pressure generated by the molding, and configured toperform supplying of the mixed gas between the imprint material on thesubstrate and the mold from the mixing unit, wherein the imprintapparatus is configured to perform the molding with the supplying havingbeen performed.
 9. An imprint method of performing molding of an imprintmaterial on a substrate using a mold to form a pattern on the substrate,the method comprising the steps of: mixing, with a mixing unit,permeable gas that permeates the mold, the imprint material or thesubstrate or any two thereof or all thereof, and condensable gas that isdifferent from gas of a constituent of the imprint material andliquefied under a pressure generated by the molding; supplying, from themixing unit, the mixed gas between the imprint material on the substrateand the mold; and performing the molding with the supplying having beenperformed.
 10. A method of manufacturing an article, the methodcomprising the steps of: mixing, with a mixing unit, permeable gas thatpermeates the mold, the imprint material or the substrate or any twothereof or all thereof, and condensable gas that is different from a gasof a constituent of the imprint material and liquefied under a pressuregenerated by molding; supplying, from the mixing unit, the mixed gasbetween the imprint material on the substrate and the mold; performingmolding, with the supplying having been performed, of the imprintmaterial on the substrate using the mold to form a pattern on thesubstrate; and processing the substrate, on which the pattern has beenformed, to manufacture the article.
 11. An imprint apparatus thatperforms molding of an imprint material on a substrate using a mold toform a pattern on the substrate, the imprint apparatus comprising: asupply unit including a mixing unit configured to mix permeable gas thatpermeates the mold, the imprint material or the substrate or any twothereof or all thereof, and condensable gas that is liquefied under apressure generated by the molding, and configured to perform supplyingof the mixed gas between the imprint material on the substrate and themold from the mixing unit, wherein the imprint apparatus is configuredto perform the molding with the supplying having been performed.
 12. Theapparatus according to claim 11, wherein the permeable gas includeshelium or hydrogen or both thereof.
 13. The apparatus according to claim11, wherein the condensable gas includes hydrofluorocarbon orhydrofluoroether or both thereof.
 14. The apparatus according to claim11, wherein the supply unit includes a supply nozzle and is configuredto supply the mixed gas from the mixing unit via the supply nozzle. 15.The apparatus according to claim 11, further comprising an adjustmentdevice configured to adjust a ratio of constituents of the mixed gas.16. The apparatus according to claim 15, further comprising: a detectorconfigured to detect a constituent of the mixed gas, wherein theadjustment device is configured to adjust the ratio based on an outputof the detector.
 17. The apparatus according to claim 11, furthercomprising a recovery nozzle configured to recover the mixed gas.
 18. Amethod of manufacturing an article, the method comprising the steps of:forming a pattern on a substrate using an imprint apparatus; andprocessing the substrate, on which the pattern has been formed, tomanufacture the article, wherein the imprint apparatus performs moldingof an imprint material on the substrate using a mold to form the patternon the substrate, the imprint apparatus including: a supply unitincluding a mixing unit configured to mix permeable gas that permeatesthe mold, the imprint material or the substrate or any two thereof orall thereof, and condensable gas that is liquefied under a pressuregenerated by the molding, and configured to perform supplying of themixed gas between the imprint material on the substrate and the moldfrom the mixing unit, wherein the imprint apparatus is configured toperform the molding with the supplying having been performed.
 19. Animprint method of performing molding of an imprint material on asubstrate using a mold to form a pattern on the substrate, the methodcomprising the steps of: mixing, with a mixing unit, permeable gas thatpermeates the mold, the imprint material or the substrate or any twothereof or all thereof, and condensable gas that is liquefied under apressure generated by the molding; supplying, from the mixing unit, themixed gas between the imprint material on the substrate and the mold;and performing the molding with the supplying having been performed. 20.A method of manufacturing an article, the method comprising the stepsof: mixing, with a mixing unit, permeable gas that permeates the mold,the imprint material or the substrate or any two thereof or all thereof,and condensable gas that is liquefied under a pressure generated bymolding; supplying, from the mixing unit, the mixed gas between theimprint material on the substrate and the mold; performing molding, withthe supplying having been performed, of the imprint material on thesubstrate using the mold to form a pattern on the substrate; andprocessing the substrate, on which the pattern has been formed, tomanufacture the article.